Chemical Regeneration and Recycling Equipment System

System Features

Through chemical regeneration and recycling equipment system, chemicals (waste liquids) used in the manufacturing of semiconductors, FPD (Flat Panel Display) and solar cells etc. are recycled, distilled and filtered along with the method of chemical addition for regeneration in order to be reused in the manufacturing process.

System Category

Through chemical regeneration and recycling equipment system, chemicals (waste liquids) used in the manufacturing of semiconductors, FPD (Flat Panel Display) and solar cells etc. are recycled, distilled and filtered along with the method of chemical addition for regeneration in order to be reused in the manufacturing process.

Description of Materials

Fluid receiving parts for solvent chemicals use the material of stainless steel (SS316LEP, SS316LBA), and the equipment external structure uses the material of stainless steel (SS304). (Model-1) For chemicals of acids and bases, the fluid receiving parts use fluorine resin (PFA, PTFE), and the equipment external structure uses PP or PVC. (Model-2) For sulfuric acid, the low-temperature parts use PFT, PTFE, and the high- temperature parts use heat resistant glass or quartz.

Service Inquiry

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