Among the chemicals used in the manufacturing of semiconductors and FPD (Flat Panel Display), low-concentration chemicals are also used.
With the chemical dilution and dispensing system, high-purity chemicals can be diluted into low-concentration chemicals with pure water in the manufacturing factory, which can be further dispensed to manufacturing equipment, thereby reducing the chemical and transportation costs.
Representative chemicals include developer (TMAH, KOH etc.), hydrofluoric acid, ammonium hydroxide and cleaning solution.
Description of Materials
The diluted chemicals can use conductivity meter, refractometer, ultrasonic concentration analyzer, near infrared method (NIR), pH meter etc., to determine the diluted concentration.
Since the diluted chemicals produced are acid or base chemicals, the fluid receiving parts use the material of fluorine resin (PFA, PTFE), and the equipment external structure uses the material of PP or PVC (Model-2).