Representative chemicals include developer (TMAH, KOH etc.), hydrofluoric acid, ammonium hydroxide and cleaning solution.
The diluted chemicals can use conductivity meter, refractometer, ultrasonic concentration analyzer, near infrared method (NIR), pH meter etc., to determine the diluted concentration.
Since the diluted chemicals produced are acid or base chemicals, the fluid receiving parts use the material of fluorine resin (PFA, PTFE), and the equipment external structure uses the material of PP or PVC (Model-2).
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